Lam tcp 9600 manual
http://lamrainbow.com/ TīmeklisLAM 9600 METAL ETCH VAT VALVE PM PROCEDURE (CONT’D): LAM 9600 Metal Etch VAT Valve PM 102210.Docx 6 Step 17: Finish scrubbing the rest of the VAT …
Lam tcp 9600 manual
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Tīmeklis• Tool: Lam TCP 9400 PTX • Process: Si trench based on HBr and Cl chemistry • Multi-step recipe including break-through and main etch • Main focus in this study: – Main … http://www.gtc.tw/TLLC10131.TCP4F01%20LAM%209400.pdf
TīmeklisLAM Alliance TCP 9600 DSiE PROCESS MODULES (PM) LAM Alliance TCP 9400 DFM PROCESS MODULES (PM) LAM Alliance TCP 9600 DFM PROCESS MODULES (PM) LAM Alliance TCP 9400 PTX PROCESS MODULES (PM) LAM Alliance TCP 9600 PTX PROCESS MODULES (PM) AAZ Equipment. Bay Area / San Jose, California. … TīmeklisLam Research TCP 9600 Download Datasheet. The Rainbow TCP 9600 Standalone System is a single wafer, vacuum load-locked low pressure metal etch system. Semigroup Equipment Sales provides a customized (to your specifications) totally refurbished Rainbow TCP 9600 Metal Etch Plasma Reactor that is fully tested at our …
TīmeklisESCT provides the following new products for LAM chambers; The ESC for 4520-Excelan has much better backside cooling and no wafer sticking. Better backside He leakrates. ... 9600. ESCT. OLD. 4520. 9600. ESCT. OLD. 4520, 4520XL, Excelan. 4520. 9600. 9600. ESCT. OLD. Please check here to see which original OEM part numbers … http://www.cycas.com/product/212.html
TīmeklisDaihen AGA-50B2-V RF Generator DGP-120A2-V DC Power Supply. Lam AutoEtch 490/590 6 inch. LAM TCP-9600 6 inch Classic software. LAM 4500 6 inch Classic software. LAM 4400 6 inch Classic software. 710-017086-018. ESC Power Supply PCB. 853-025054-018. ASSY, HSG, ESC PS/UNBAL, DYNA-FBK.
TīmeklisLam Research TCP 9400 Poly Etcher (lampoly) Overview Lampoly is a Transformer Coupled Plasma (TCP) etcher, generates a uniform, high density plasma for … boni christopher dohttp://www.semistarcorp.com/product/lam-research-ceramic-quartz-parts/ go create threadTīmeklisAG Semiconductor Services • [email protected] • www.agsemiconductor.com 1 EQUIPMENT DATASHEET Tool ID TCP4F01 … bonichot jean claudeTīmeklisLAM Alliance TCP 9600 PTX PROCESS MODULES (PM) / CHAMBERS (PM) LAM TCP 9400 SE LAM TCP 9400 SE II LAM TCP 9600 SE LAM TCP 9600 SE II Rainbows are a common workhorse machine and have lost much of their supportability over time. We know them well. LAM Rainbow 4420 LAM Rainbow 4420XL LAM Rainbow 4520 … go create thirroulTīmeklis2013. gada 16. okt. · Pfeiffer TCP 121 TCP121A ModNr: PM C01 497 B Vacuum Pum. ... CTI-Cryogenics 9600 Compressor 8135900G001 working 51,5. CTI-Cryogenics ON-BOARD 10 Cryopump 8116148G003 rebuilt. Semitool 610T0302-501 Transfer Robot working. ... Lam Research 852-014681-583 RF Cart 851-014680-583 no G. bonichot girardhttp://semigroup.com/wp-content/uploads/2015/01/LamResearchTCP9600.pdf go create much hoolegocreativegraphics.com